An edition of JTEC panel on x-ray lithography in Japan (1991)

JTEC panel on x-ray lithography in Japan

final report

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JTEC panel on x-ray lithography in Japan
James T. Clemens, James T. Cle ...
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Last edited by MARC Bot
December 12, 2024 | History
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An edition of JTEC panel on x-ray lithography in Japan (1991)

JTEC panel on x-ray lithography in Japan

final report

by

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Publish Date
Publisher
Loyola College
Language
English
Pages
188

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Subjects

X-ray lithography, Research

Places

Japan
Edition Availability
Cover of: JTEC panel on x-ray lithography in Japan
JTEC panel on x-ray lithography in Japan: final report
1991, Loyola College
in English

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Book Details

Edition Notes

Includes bibliographical references.

Published in
Baltimore
Other Titles
X-ray lithogrpahy in Japan

The Physical Object

Pagination
xii, 188 p.
Number of pages
188

Edition Identifiers

Open Library
OL57169647M
OCLC/WorldCat
58412483

Work Identifiers

Work ID
OL42125220W

Source records

harvard_bibliographic_metadata record

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