An edition of Process development for 3D silicon microstructures, with application to mechanical sensor devices

Process development for 3D silicon microstructures, with application to mechanical sensor devices

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Process development for 3D silicon microstruc ...
Eric Peeters, Eric Peeters
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Last edited by MARC Bot
December 12, 2024 | History
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An edition of Process development for 3D silicon microstructures, with application to mechanical sensor devices

Process development for 3D silicon microstructures, with application to mechanical sensor devices

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Publish Date
Language
English
Pages
332

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Edition Availability
Cover of: Process development for 3D silicon microstructures, with application to mechanical sensor devices
Process development for 3D silicon microstructures, with application to mechanical sensor devices
19uu
in English

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Book Details

Edition Notes

Photocpy.

Summary in Dutch.

Thesis (doctoral)--Katholieke Universiteit te Leuven (1970-)

The Physical Object

Pagination
332, 23 p.
Number of pages
332

Edition Identifiers

Open Library
OL57187950M
OCLC/WorldCat
55648247

Work Identifiers

Work ID
OL42142167W

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harvard_bibliographic_metadata record

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