An edition of Resists in microlithography and printing (1993)

Resists in microlithography and printing

2nd rev. ed.

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Cover of: Resists in microlithography and printing by B. Bednář
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Last edited by Open Library Bot
December 4, 2010 | History
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An edition of Resists in microlithography and printing (1993)

Resists in microlithography and printing

2nd rev. ed.

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Elsevier
Language
English
Pages
376

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Previews available in: English

Subjects
Design and construction, Electron beam Lithography, Integrated circuits, Microlithography, Semiconductors, Very large scale integration, X-ray lithography

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Edition Availability
Cover of: Resists in microlithography and printing
Resists in microlithography and printing
1993, Elsevier
in English - 2nd rev. ed.
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and index.
Translation of: Litografické techniky.

Published in
Amsterdam, New York
Series
Materials science monographs ;, 76

Classifications

Dewey Decimal Class
621.381/52
Library of Congress
TK7871.85 .B375313 1993

The Physical Object

Pagination
376 p. :
Number of pages
376

ID Numbers

Open Library
OL1704368M
Internet Archive
resistsinmicroli0000bedn
ISBN 10
0444988467
LCCN
92005585
Goodreads
4519327

Source records

Library of Congress MARC record
Promise Item

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History

Download catalog record: RDF / JSON
December 4, 2010 Edited by Open Library Bot Added subjects from MARC records.
December 10, 2009 Created by WorkBot add works page