An edition of Raschet i proektirovanie ustroĭstv ėlektronnoĭ i ionnoĭ litografii (1985)

Raschet i proektirovanie ustroĭstv ėlektronnoĭ i ionnoĭ litografii

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Raschet i proektirovanie ustroĭstv ėlektron ...
V. K. Popov, V. K. Popov
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Last edited by Open Library Bot
December 4, 2010 | History
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An edition of Raschet i proektirovanie ustroĭstv ėlektronnoĭ i ionnoĭ litografii (1985)

Raschet i proektirovanie ustroĭstv ėlektronnoĭ i ionnoĭ litografii

by

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Publish Date
Publisher
"Radio i svi͡a︡zʹ"
Language
Russian
Pages
125

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Subjects

Electron beam Lithography, Ion beam lithography, Microelectronics

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Edition Availability
Cover of: Raschet i proektirovanie ustroĭstv ėlektronnoĭ i ionnoĭ litografii
Raschet i proektirovanie ustroĭstv ėlektronnoĭ i ionnoĭ litografii
1985, "Radio i svi͡a︡zʹ"
in Russian
  • Not in Library

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Book Details

Edition Notes

Bibliography: p. 124-[126]

Published in
Moskva
Series
Biblioteka tekhnologa radioėlektronnoĭ apparatury, Biblioteka tekhnologa radioėlektronnoĭ apparatury (Radio i svi͡a︡zʹ (Firm))

Classifications

Library of Congress
TK7874 .P67 1985

The Physical Object

Pagination
125, [3] p. :
Number of pages
125

ID Numbers

Open Library
OL2650233M
LCCN
85231530

Source records

Library of Congress MARC record
Library of Congress MARC record

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History

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December 4, 2010 Edited by Open Library Bot Added subjects from MARC records.
December 10, 2009 Created by WorkBot add works page