Chemical Vapor Deposition for Microelectronics

Principles, Technology, and Applications (Materials Science and Process Technology)

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Last edited by MARC Bot
November 5, 2020 | History

Chemical Vapor Deposition for Microelectronics

Principles, Technology, and Applications (Materials Science and Process Technology)

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Noyes Publications
Language
English
Pages
215

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Previews available in: English

Edition Availability
Cover of: Chemical Vapor Deposition for Microelectronics
Cover of: Chemical vapor deposition for microelectronics

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Book Details


First Sentence

"Chemical vapor deposition (CVD) is a process where one or more gaseous species react on a solid surface and one of the reaction products is a solid phase material."

The Physical Object

Format
Hardcover
Number of pages
215
Dimensions
9.3 x 6.2 x 0.6 inches
Weight
15.8 ounces

ID Numbers

Open Library
OL8048738M
Internet Archive
chemicalvapordep00sher
ISBN 10
0815511361
ISBN 13
9780815511366
Goodreads
3583498

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Internet Archive item record

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History

Download catalog record: RDF / JSON
November 5, 2020 Edited by MARC Bot import existing book
July 31, 2020 Edited by ImportBot import existing book
December 4, 2010 Edited by Open Library Bot Added subjects from MARC records.
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
December 10, 2009 Created by WorkBot add works page