Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

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Last edited by MARC Bot
July 22, 2024 | History

Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

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Publish Date
Language
English
Pages
550

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Edition Availability
Cover of: Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

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Book Details


Edition Notes

Includes bibliographies and indexes.
Spine title: Silicon nitride and silicon dioxide thin insulating films.

Published in
Pennington, NJ (10 S. Main St., Pennington 08534-2696
Series
Proceedings / Electrochemical Society ;, v. 87-10, Proceedings (Electrochemical Society) ;, v. 87-10.
Other Titles
Silicon nitride and silicon dioxide thin insulating films.

Classifications

Dewey Decimal Class
621.381/73
Library of Congress
TK7872.T55 S94 1986

The Physical Object

Pagination
x, 550 p. :
Number of pages
550

ID Numbers

Open Library
OL2416305M
LCCN
87082368
OCLC/WorldCat
16953068

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History

Download catalog record: RDF / JSON
July 22, 2024 Edited by MARC Bot import existing book
December 4, 2010 Edited by Open Library Bot Added subjects from MARC records.
December 10, 2009 Created by WorkBot add works page