An edition of Methods and materials in microelectronic technology (1984)

Methods and materials in microelectronic technology

by

Cover of: Methods and materials in microelectronic technology by International Symposium on Methods and Materials in Microelectronic Technology (1982 Bad Neuenahr-Ahrweiler, Germany), International Symposium on Methods and Materials in Microelectronic Technology (1982 Bad Neuenahr-Ahrweiler, Germany)
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Last edited by Open Library Bot
December 4, 2010 | History
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An edition of Methods and materials in microelectronic technology (1984)

Methods and materials in microelectronic technology

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Publish Date
Publisher
Plenum Press
Language
English
Pages
367

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Subjects

Congresses, Design and construction, Integrated circuits, Ion beam lithography, Photolithography, Very large scale integration, X-ray lithography

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Edition Availability
Cover of: Methods and materials in microelectronic technology
Methods and materials in microelectronic technology
1984, Plenum Press
in English
  • Not in Library
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Book Details

Edition Notes

Includes bibliographies and index.
"Proceedings of the International Symposium on Methods and Materials in Microelectronic Technology, held September 29-October 1, 1982, in Bad Neuenahr, Federal Republic of Germany"--T.p. verso.

Published in
New York
Series
The IBM research symposia series
Other Titles
Microelectronic technology.

Classifications

Dewey Decimal Class
621.381/7
Library of Congress
TK7874 .I5924 1982

The Physical Object

Pagination
viii, 367 p. :
Number of pages
367

ID Numbers

Open Library
OL2851047M
ISBN 10
0306418037
LCCN
84013352
Goodreads
1918030

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History

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December 4, 2010 Edited by Open Library Bot Added subjects from MARC records.
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
December 10, 2009 Created by WorkBot add works page