An edition of Numerical simulation of the flow, temperature and concentration fields in a radio frequency plasma CVD reactor

Numerical simulation of the flow, temperature and concentration fields in a radio frequency plasma CVD reactor

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Numerical simulation of the flow, temperature ...
Zhao, Guoying., Zhao, Guoying.
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Last edited by WorkBot
December 10, 2009 | History
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An edition of Numerical simulation of the flow, temperature and concentration fields in a radio frequency plasma CVD reactor

Numerical simulation of the flow, temperature and concentration fields in a radio frequency plasma CVD reactor

by

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Publisher
Chinese Academy of Sciences, Institute of Mechanics.
Pages
14

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Edition Availability
Cover of: Numerical simulation of the flow, temperature and concentration fields in a radio frequency plasma CVD reactor
Numerical simulation of the flow, temperature and concentration fields in a radio frequency plasma CVD reactor
Publish date unknown, Chinese Academy of Sciences, Institute of Mechanics.

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Book Details

Edition Notes

Includes bibliographical references.

Published in
Beijing

The Physical Object

Pagination
[14] p. :
Number of pages
14

ID Numbers

Open Library
OL22344579M

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