An edition of Stress-induced phenomena in metallization (2004)

Stress-induced phenomena in metallization

Seventh International Workshop on Stress-Induced Phenomena in Metallization, Austin, Texas, 14-16 June 2004

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Cover of: Stress-induced phenomena in metallization by International Workshop on Stress-Induced Phenomena in Metallization (7th 2004 Austin, Tex.), International Workshop on Stress-Induced Phenomena in Metallization (7th 2004 Austin, Tex.)
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Last edited by MARC Bot
December 30, 2022 | History
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An edition of Stress-induced phenomena in metallization (2004)

Stress-induced phenomena in metallization

Seventh International Workshop on Stress-Induced Phenomena in Metallization, Austin, Texas, 14-16 June 2004

by

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Publish Date
Publisher
American Institute of Physics
Language
English
Pages
272

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Subjects

Congresses, Copper, Damascening, Defects, Dielectric films, Electric properties, Electrodiffusion, Integrated circuits, Interconnects (Integrated circuit technology), Metallic films, Metallizing, Semiconductors, Thin film devices, Aluminum films
Edition Availability
Cover of: Stress-Induced Phenomena in Metallization
Stress-Induced Phenomena in Metallization: Seventh International Workshop on Stress-Induced Phenomena in Metallization (AIP Conference Proceedings / AIP ... Phenomena Metallizat.)
December 14, 2004, American Institute of Physics
Hardcover in English - 1 edition
Cover of: Stress-induced phenomena in metallization
Stress-induced phenomena in metallization: Seventh International Workshop on Stress-Induced Phenomena in Metallization, Austin, Texas, 14-16 June 2004
2004, American Institute of Physics
in English

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Book Details

Table of Contents

Fracture and reliability for low k dielectrics
Electromigration
Thermal stresses and void formation.

Edition Notes

Includes bibliographical references and indexes.
"Held at the University of Texas at Austin"--Pref.
Also available via the World Wide Web.

Published in
Melville, N.Y
Series
AIP conference proceedings,, v. 741, AIP conference proceedings ;, no. 741.
Genre
Congresses.
Other Titles
Stress induced phenomena in metallization

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TK7871.85 .I58445 2004, QC611 .S87 2004

The Physical Object

Pagination
vii, 272 p. :
Number of pages
272

ID Numbers

Open Library
OL3316905M
ISBN 10
0735402256
LCCN
2004116273
OCLC/WorldCat
57340844
Goodreads
3366542

Source records

Library of Congress MARC record
marc_columbia MARC record

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History

Download catalog record: RDF / JSON
December 30, 2022 Edited by MARC Bot import existing book
December 5, 2010 Edited by Open Library Bot Added subjects from MARC records.
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
December 10, 2009 Created by WorkBot add works page