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Publish Date
1994
Publisher
National Aeronautics and Space Administration,
National Technical Information Service, distributor
Language
English
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Edition | Availability |
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[Sputter process investigation]: final technical report
1994, National Aeronautics and Space Administration, National Technical Information Service, distributor
Microform
in English
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Book Details
Edition Notes
Distributed to depository libraries in microfiche.
Shipping list no.: 94-0859-M.
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1994] 1 microfiche.
Subtitle found in format: [material and environment interaction processes investigation] :
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