An edition of Investigation of refractory dielectrics for integrated circuits (1968)

Investigation of refractory dielectrics for integrated circuits

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Investigation of refractory dielectrics for i ...
V. Y. Doo, V. Y. Doo
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Last edited by Open Library Bot
December 5, 2010 | History
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An edition of Investigation of refractory dielectrics for integrated circuits (1968)

Investigation of refractory dielectrics for integrated circuits

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Publish Date
Publisher
National Aeronautics and Space Administration; for sale by the Clearinghouse for Federal Scientific and Technical Information, Springfield, Va.
Language
English
Pages
73

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Subjects

Dielectrics, Integrated circuits, Silicon nitride

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Edition Availability
Cover of: Investigation of refractory dielectrics for integrated circuits
Investigation of refractory dielectrics for integrated circuits
1968, National Aeronautics and Space Administration; for sale by the Clearinghouse for Federal Scientific and Technical Information, Springfield, Va.
in English
  • Not in Library

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Book Details

Edition Notes

Bibliography: p. 69.
Prepared by International Business Machines Corp., Cambridge, Mass. for Electronics Research Center.

Published in
[Washington]
Series
NASA CR-955, NASA contract report ;, NASA CR-955.

Classifications

Dewey Decimal Class
621.3817/3
Library of Congress
TL521.3.C6 A3 no. 955

The Physical Object

Pagination
vi, 73 p.
Number of pages
73

ID Numbers

Open Library
OL5275383M
LCCN
71600618

Source records

Library of Congress MARC record

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History

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December 5, 2010 Edited by Open Library Bot Added subjects from MARC records.
December 10, 2009 Created by WorkBot add works page