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Subjects
Dielectrics, Integrated circuits, Silicon nitrideEdition | Availability |
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1
Investigation of refractory dielectrics for integrated circuits
1968, National Aeronautics and Space Administration; for sale by the Clearinghouse for Federal Scientific and Technical Information, Springfield, Va.
in English
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Book Details
Edition Notes
Bibliography: p. 69.
Prepared by International Business Machines Corp., Cambridge, Mass. for Electronics Research Center.
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Feedback?December 5, 2010 | Edited by Open Library Bot | Added subjects from MARC records. |
December 10, 2009 | Created by WorkBot | add works page |