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The cleaning of semiconductor wafers has become one of the most critical operations in the fabrication of semiconductor devices. The considerable body of technical and scientific literature is widely dispersed in numerous journals and symposia proceedings. This book brings together in one volume all pertinent knowledge on semiconductor wafer cleaning and its associated scientific and technical disciplines. It provides the first comprehensive and up-to-date coverage of this rapidly evolving field.
Its thirteen chapters were written by nineteen scientists who are recognized experts in each topic. The scope of this book is very broad, covering all aspects of wafer cleaning. Emphasis is on practical applications in the fab combined with authoritative scientific background information to provide a solid scientific basis for understanding the chemical and physical processes involved in cleaning and in the analytical methods of testing and evaluation.
The depth and breadth of the material should appeal to those new in the field as well as to experienced professionals. The volume is intended to serve as a handbook for practitioners and professionals in the field of semiconductor microelectronics, including fab engineers, scientists and technicians. It should also prove useful to manufacturers of processing equipment, persons concerned with contamination control and analysis, and students attending advanced or specialized technical courses.
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Previews available in: English
Showing 3 featured editions. View all 3 editions?
Edition | Availability |
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1
Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology and Applications
1993, Elsevier Science & Technology Books
in English
0815517726 9780815517726
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2
Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications (Materials Science and Process Technology Series)
August 1, 1993, Noyes Publications
Hardcover
in English
0815513313 9780815513315
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3
Handbook of semiconductor wafer cleaning technology: science, technology, and applications
1993, Noyes Publications
in English
0815513313 9780815513315
|
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Libraries near you:
WorldCat
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Includes bibliographical references and index.
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