An edition of Etching in microsystem technology (1999)

Etching in microsystem technology

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Cover of: Etching in microsystem technology by J. M. Köhler, J. M. Köhler
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Last edited by ImportBot
October 17, 2022 | History
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An edition of Etching in microsystem technology (1999)

Etching in microsystem technology

by

  • 1 Want to read

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Publish Date
Publisher
Wiley-VCH
Language
English
Pages
368

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Previews available in: English

Subjects

Masks (Electronics), Microlithography, Plasma etching, Microcomputers, design and construction, Computer engineering

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Edition Availability
Cover of: Etching in microsystem technology
Etching in microsystem technology
1999, Wiley-VCH
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references ([345]-360) and index.

Published in
Weinheim, New York

Classifications

Dewey Decimal Class
621.3815/31
Library of Congress
TK7872.M3 K64 1999, TK7872.M3K64 1999

The Physical Object

Pagination
xvi, 368 p. :
Number of pages
368

ID Numbers

Open Library
OL112876M
Internet Archive
etchingmicrosyst00kohl
ISBN 10
3527295615
LCCN
99233639
OCLC/WorldCat
40684553
Goodreads
1149107

Source records

Internet Archive item record
amazon.com record
Library of Congress MARC record
Internet Archive item record
Better World Books record
Promise Item
marc_columbia MARC record

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History

Download catalog record: RDF / JSON
October 17, 2022 Edited by ImportBot import existing book
December 4, 2010 Edited by Open Library Bot Added subjects from MARC records.
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
December 9, 2009 Created by WorkBot add works page