Microlithography

high integration in microelectronics : proceedings of the first workshop, Rio de Janeiro, Brazil, Aug. 28-Sept. 1, 1989

Microlithography
Aldo Craievich
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Last edited by MARC Bot
March 10, 2019 | History

Microlithography

high integration in microelectronics : proceedings of the first workshop, Rio de Janeiro, Brazil, Aug. 28-Sept. 1, 1989

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Publish Date
Publisher
World Scientific
Language
English
Pages
184

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Book Details


Edition Notes

Includes bibliographical references.

Published in
Singapore, Teaneck, NJ
Genre
Congresses.

The Physical Object

Pagination
viii, 184 p. :
Number of pages
184

Edition Identifiers

Open Library
OL18666711M
ISBN 10
9810201370
OCLC/WorldCat
22292726

Work Identifiers

Work ID
OL9150538W

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March 10, 2019 Edited by MARC Bot import existing book
December 10, 2009 Created by WorkBot add works page