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Previews available in: English
Edition | Availability |
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Pvd for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing (Thin Films)
November 15, 1998, Academic Press
Hardcover
in English
- 1st edition
012533026X 9780125330268
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Book Details
First Sentence
"The physical process tat we now call sputtering was first reported in 1852 by Sir William Robert Grove [1.1], who described the effect as "cathodic disintegration.""
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Feedback?July 6, 2019 | Edited by MARC Bot | import existing book |
April 28, 2010 | Edited by Open Library Bot | Linked existing covers to the work. |
December 11, 2009 | Created by WorkBot | add works page |