An edition of Pvd for Microelectronics (1998)

Pvd for Microelectronics

Sputter Deposition Applied to Semiconductor Manufacturing (Thin Films)

1st edition
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Last edited by MARC Bot
July 6, 2019 | History
An edition of Pvd for Microelectronics (1998)

Pvd for Microelectronics

Sputter Deposition Applied to Semiconductor Manufacturing (Thin Films)

1st edition

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Publish Date
Publisher
Academic Press
Language
English
Pages
419

Buy this book

Previews available in: English

Edition Availability
Cover of: Pvd for Microelectronics
Pvd for Microelectronics: Sputter Deposition Applied to Semiconductor Manufacturing (Thin Films)
November 15, 1998, Academic Press
Hardcover in English - 1st edition

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Book Details


First Sentence

"The physical process tat we now call sputtering was first reported in 1852 by Sir William Robert Grove [1.1], who described the effect as "cathodic disintegration.""

Classifications

Library of Congress
TK7872.T55P68 1998

The Physical Object

Format
Hardcover
Number of pages
419
Dimensions
9 x 5.9 x 1.2 inches
Weight
1.8 pounds

ID Numbers

Open Library
OL9823170M
Internet Archive
pvdformicroelect00powe
ISBN 10
012533026X
ISBN 13
9780125330268
Library Thing
8249951
Goodreads
1767002

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History

Download catalog record: RDF / JSON
July 6, 2019 Edited by MARC Bot import existing book
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
December 11, 2009 Created by WorkBot add works page