An edition of Methods and Materials in Microelectronic Technology (1984)

Methods and Materials in Microelectronic Technology

1 edition

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Cover of: Methods and Materials in Microelectronic Technology by Joachim Bargon, Joachim Bargon
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Last edited by MARC Bot
October 30, 2020 | History
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An edition of Methods and Materials in Microelectronic Technology (1984)

Methods and Materials in Microelectronic Technology

1 edition

by

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Publish Date
Publisher
Springer
Language
English
Pages
376

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Previews available in: English

Subjects

Congresses, Photolithography, Ion beam lithography, X-ray lithography, Very large scale integration, Integrated circuits, Design and construction
Edition Availability
Cover of: Methods and Materials in Microelectronic Technology
Methods and Materials in Microelectronic Technology
2013, Springer London, Limited
in English
Cover of: Methods and Materials in Microelectronic Technology
Methods and Materials in Microelectronic Technology
2012, Springer
in English
Cover of: Methods and Materials in Microelectronic Technology
Methods and Materials in Microelectronic Technology
November 30, 1984, Springer
Hardcover in English - 1 edition

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Book Details

Edition Notes

Series
Ibm Research Symposia Series

Classifications

Library of Congress
TK7874 .I5924 1982

The Physical Object

Format
Hardcover
Number of pages
376

Edition Identifiers

Open Library
OL10323517M
Internet Archive
methodsmaterials0000inte
ISBN 10
0306418037
ISBN 13
9780306418037
LCCN
84013352
OCLC/WorldCat
10913539
Goodreads
1918030

Work Identifiers

Work ID
OL9382521W

Source records

Library of Congress MARC record
Internet Archive item record
marc_columbia MARC record
Promise Item
harvard_bibliographic_metadata record

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October 30, 2020 Edited by MARC Bot import existing book
June 20, 2012 Edited by AMillarBot remove series from title (Ibm Research Symposia Series)
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
December 11, 2009 Created by WorkBot add works page