Advances in resist technology and processing VII

5-6 March 1990, San Jose, California

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Last edited by MARC Bot
July 26, 2024 | History

Advances in resist technology and processing VII

5-6 March 1990, San Jose, California

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Publish Date
Publisher
SPIE
Language
English
Pages
595

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Edition Availability
Cover of: Advances in resist technology and processing VII
Cover of: Advances in resist technology and processing VII
Cover of: Advances in Resist Technology and Processing VII
Advances in Resist Technology and Processing VII
December 1990, Society of Photo Optical
Paperback in English

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Book Details


Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash., USA
Series
SPIE proceedings series -- v. 1262., Proceedings of SPIE--the International Society for Optical Engineering -- v. 1262.
Genre
Congresses.

The Physical Object

Pagination
viii, 595 p. :
Number of pages
595

ID Numbers

Open Library
OL19567347M
ISBN 10
0819403091
ISBN 13
9780819403094
LCCN
90060892
OCLC/WorldCat
22188466

Source records

Oregon Libraries MARC record

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History

Download catalog record: RDF / JSON
July 26, 2024 Edited by MARC Bot import existing book
February 7, 2019 Edited by MARC Bot import existing book
June 1, 2012 Edited by AMillarBot remove series from title (Spie Proceedings, Vol 1262)
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
December 11, 2009 Created by WorkBot add works page