An edition of Advance in Resist Technology and Processing XIII (1996)

Advances in resist technology and processing XIII

11-13 March 1996, Santa Clara, California

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Cover of: Advances in resist technology and processing XIII by Roderick R. Kunz, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH.
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Last edited by ImportBot
July 31, 2020 | History
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An edition of Advance in Resist Technology and Processing XIII (1996)

Advances in resist technology and processing XIII

11-13 March 1996, Santa Clara, California

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
International Society for Optical Engineering
Language
English
Pages
774

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Subjects
Photoresists, Congresses, Microlithography

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Edition Availability
Cover of: Advance in Resist Technology and Processing XIII
Advance in Resist Technology and Processing XIII
May 31, 1997, SPIE Society of Photo-Optical Instrumentation Engi, Society of Photo-Optical Instrumentation Engineers (SPIE)
Hardcover
Libraries near you: WorldCat
Cover of: Advances in resist technology and processing XIII
Advances in resist technology and processing XIII: 11-13 March 1996, Santa Clara, California
1996, International Society for Optical Engineering
in English
  • Not in Library
Libraries near you: WorldCat
Cover of: Advances in resist technology and processing XIII
Advances in resist technology and processing XIII: 11-13 March 1996, Santa Clara, California
1996, International Society for Optical Engineering
in English
Libraries near you: WorldCat

Add another edition?

Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash., USA
Series
Proceedings SPIE--the International Society for Optical Engineering -- v. 2724., Proceedings of SPIE--the International Society for Optical Engineering -- v. 2724.
Genre
Congresses.

The Physical Object

Pagination
xi, 774 p. :
Number of pages
774

ID Numbers

Open Library
OL19567846M
ISBN 10
0819421006
ISBN 13
9780819421005
LCCN
91061057
OCLC/WorldCat
35108651

Source records

Oregon Libraries MARC record

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History

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July 31, 2020 Edited by ImportBot import existing book
February 8, 2019 Edited by MARC Bot import existing book
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
December 11, 2009 Created by WorkBot add works page