An edition of Optical Microlithography XV (2002)

Optical microlithography XV

5-8 March, 2002, Santa Clara, [California], USA

by

Optical microlithography XV
Anthony Yen
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Last edited by MARC Bot
February 9, 2019 | History
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An edition of Optical Microlithography XV (2002)

Optical microlithography XV

5-8 March, 2002, Santa Clara, [California], USA

by

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Publish Date
Language
English

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Subjects

Integrated circuits, Congresses, Masks, X-ray lithography, Microlithography, Manufacturing processes
Edition Availability
Cover of: Optical Microlithography XV
Optical Microlithography XV
April 30, 2002, SPIE Society of Photo-Optical Instrumentation Engi
Hardcover
Cover of: Optical microlithography XV
Optical microlithography XV: 5-8 March, 2002, Santa Clara, [California], USA
2002
in English
Cover of: Optical microlithography XV
Optical microlithography XV: 5-8 March, 2002, Santa Clara, [California], USA
2002
in English

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Book Details

Edition Notes

Includes bibliographic references and author index.

Published in
Bellingham, Washington SPIE
Series
SPIE proceedings series -- v. 4691, Proceedings of SPIE--the International Society for Optical Engineering -- v. 4691.
Genre
Congresses

Classifications

Dewey Decimal Class
621.3815/31
Library of Congress
TK7835 .O664 2002

The Physical Object

Pagination
2 v. :

ID Numbers

Open Library
OL23933673M
ISBN 10
0819444375
LCCN
2003268660

Source records

Library of Congress MARC record

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History

Download catalog record: RDF / JSON
February 9, 2019 Edited by MARC Bot import existing book
December 11, 2009 Created by WorkBot add works page