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Subjects
Congresses, X-ray lithographyEdition | Availability |
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1
Soft X-Ray Projection Lithography (Proceedings Series, Vol 12)
November 1991, Optical Society of America
Hardcover
in English
1557521875 9781557521873
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WorldCat
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2
OSA proceedings on soft-x-ray projection lithography: proceedings of the Topical Meeting, April 10-12, 1991, Monterey, California
1991, Optical Society of America
in English
1557521875 9781557521873
|
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Libraries near you:
WorldCat
|
Book Details
Edition Notes
Proceedings of the Topical Meeting on Soft-X-Ray Projection Lithography.
Includes bibliographical references.
Classifications
The Physical Object
ID Numbers
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Feedback?March 12, 2019 | Edited by MARC Bot | import existing book |
December 11, 2009 | Created by WorkBot | add works page |