OSA proceedings on soft-x-ray projection lithography

proceedings of the Topical Meeting, April 10-12, 1991, Monterey, California

OSA proceedings on soft-x-ray projection lith ...
Jeffrey Bokor
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Last edited by MARC Bot
March 12, 2019 | History

OSA proceedings on soft-x-ray projection lithography

proceedings of the Topical Meeting, April 10-12, 1991, Monterey, California

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Publish Date
Language
English
Pages
152

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Edition Availability
Cover of: Soft X-Ray Projection Lithography (Proceedings Series, Vol 12)
Soft X-Ray Projection Lithography (Proceedings Series, Vol 12)
November 1991, Optical Society of America
Hardcover in English
Cover of: OSA proceedings on soft-x-ray projection lithography

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Book Details


Edition Notes

Proceedings of the Topical Meeting on Soft-X-Ray Projection Lithography.

Includes bibliographical references.

Published in
Washington, D.C
Series
OSA proceedings -- vol. 12, OSA proceeding series -- v. 12.
Other Titles
Soft-X-Ray Projection Lithography.

Classifications

Library of Congress
TA7874 .O75 1991

The Physical Object

Pagination
xi, 152 p. :
Number of pages
152

ID Numbers

Open Library
OL20908376M
ISBN 10
1557521875

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History

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March 12, 2019 Edited by MARC Bot import existing book
December 11, 2009 Created by WorkBot add works page