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Last edited by ImportBot
September 18, 2008 | History
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Michael A. Viliardos

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  • Cover of: Thermal annealing of Mo/Si multilayers to assess the stability relevant to soft x-ray projection lithography

    First published in 1992 — 1 edition
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Subjects

Multilayered Thin films, Optical coatings, Reflectance, Thin films, Multilayered, X-ray lithography, X-ray optics

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ID Numbers

  • OLID: OL4812699A

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History

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September 18, 2008 Created by ImportBot Imported from Oregon Libraries MARC record