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![Cover of: Chemical-mechanical polishing, fundamentals and challenges: symposium held April 5-7, 1999, San Francisco, California, U.S.A. / c editors, S.V. Babu ... [et al.].](http://covers.openlibrary.org/b/id/5172347-M.jpg "Cover of: Chemical-mechanical polishing, fundamentals and challenges: symposium held April 5-7, 1999, San Francisco, California, U.S.A. / c editors, S.V. Babu ... [et al.].")
Subjects
Electrolytic polishing, Grinding and polishing, Chemical mechanical planarization, CongressesID Numbers
- OLID: OL8238188A
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