An edition of Emerging Lithographic Technologies 9 (2005)

Emerging Lithographic Technologies 9

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Cover of: Emerging Lithographic Technologies 9 by R. Scott Mackay, R. Scott Mackay
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Last edited by MARC Bot
December 14, 2020 | History
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An edition of Emerging Lithographic Technologies 9 (2005)

Emerging Lithographic Technologies 9

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Publish Date
Publisher
SPIE-International Society for Optical Engine
Language
English
Pages
1286

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Subjects

Lithography, electron beam, Electron beams, X-ray lithography, X-rays, industrial applications, Electronics, Electron beam Lithography, Congresses, Microlithography, Industrial applications, X-rays, Masks (Electronics)

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Edition Availability
Cover of: Emerging Lithographic Technologies 9
Emerging Lithographic Technologies 9
May 30, 2005, SPIE-International Society for Optical Engine
Paperback in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Edition Notes

Proceedings of SPIE

Classifications

Library of Congress
TK7874.E5269 2005, TK7874 .E5269 2005

The Physical Object

Format
Paperback
Number of pages
1286
Dimensions
10.8 x 8.4 x 2.7 inches
Weight
6.6 pounds

ID Numbers

Open Library
OL11393594M
ISBN 10
0819457310
ISBN 13
9780819457318
LCCN
2006271122
Goodreads
4234748

Source records

Better World Books record
Library of Congress MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
December 14, 2020 Edited by MARC Bot import existing book
October 8, 2020 Edited by ImportBot import existing book
August 1, 2020 Edited by ImportBot import existing book
January 12, 2011 Edited by AMillarBot move edition notes from title to notes field (Proceedings of SPIE)
April 30, 2008 Created by an anonymous user Imported from amazon.com record