An edition of Chemical-Mechanical Planarization--Integration, Technology and Reliability (2005)

Chemical-Mechanical Planarization--Integration, Technology and Reliability

Symposium Held March 28-31, 2005, San Francisco, California, U.S.A. (Materials Research Society Symposium Proceedings)

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Cover of: Chemical-Mechanical Planarization--Integration, Technology and Reliability by Ashok Kumar, Ashok Kumar
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Last edited by MARC Bot
December 29, 2022 | History
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An edition of Chemical-Mechanical Planarization--Integration, Technology and Reliability (2005)

Chemical-Mechanical Planarization--Integration, Technology and Reliability

Symposium Held March 28-31, 2005, San Francisco, California, U.S.A. (Materials Research Society Symposium Proceedings)

by

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Publish Date
Publisher
Materials Research Society
Language
English
Pages
302

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Subjects

Microelectronics, Grinding and polishing, Metals, pickling, Semiconductors, Congresses, Materials, Metals, Pickling, Surfaces, Chemical mechanical planarization
Edition Availability
Cover of: Chemical-Mechanical Planarization--Integration, Technology and Reliability
Chemical-Mechanical Planarization--Integration, Technology and Reliability: Symposium Held March 28-31, 2005, San Francisco, California, U.S.A. (Materials Research Society Symposium Proceedings)
January 2005, Materials Research Society
Hardcover in English

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Book Details

Classifications

Library of Congress
TK7871 .C465 2005

The Physical Object

Format
Hardcover
Number of pages
302

ID Numbers

Open Library
OL12092043M
ISBN 10
1558998209
ISBN 13
9781558998209
LCCN
2005285362
OCLC/WorldCat
61263882
Library Thing
4669768
Goodreads
7164099

Source records

Better World Books record
Library of Congress MARC record
marc_columbia MARC record

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Download catalog record: RDF / JSON / OPDS | Wikipedia citation
December 29, 2022 Edited by MARC Bot import existing book
December 11, 2020 Edited by MARC Bot import existing book
October 8, 2020 Edited by ImportBot import existing book
August 1, 2020 Edited by ImportBot import existing book
April 30, 2008 Created by an anonymous user Imported from amazon.com record