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An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering.
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Edition | Availability |
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1
Thin Films Material Technology: Sputtering of Compound Materials
September 23, 2004, Springer
Hardcover
in English
- 1 edition
3540211187 9783540211181
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- Created April 30, 2008
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December 19, 2022 | Edited by MARC Bot | import existing book |
April 24, 2010 | Edited by Open Library Bot | Fixed duplicate goodreads IDs. |
April 16, 2010 | Edited by bgimpertBot | Added goodreads ID. |
April 13, 2010 | Edited by Open Library Bot | Linked existing covers to the edition. |
April 30, 2008 | Created by an anonymous user | Imported from amazon.com record |