MEMS length and strain measurements using an optical interferometer

MEMS length and strain measurements using an ...
J. C. Marshall, J. C. Marshall
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Last edited by VacuumBot
August 4, 2012 | History

MEMS length and strain measurements using an optical interferometer

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Edition Availability
Cover of: MEMS length and strain measurements using an optical interferometer
MEMS length and strain measurements using an optical interferometer
2001, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology
Microform in English
Cover of: MEMS length and strain measurements using an optical interferometer
MEMS length and strain measurements using an optical interferometer
2001, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology
Microform in English
Cover of: MEMS length and strain measurements using an optical interferometer
MEMS length and strain measurements using an optical interferometer
2001, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology
Microform in English

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Book Details


Edition Notes

"August 2, 2001."

Shipping list no.: 2002-0384-M

Includes bibliographical references (p. 42-44)

Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., 2002 1 microfiche : negative

Published in
Gaithersburg, MD
Series
NISTIR -- 6779

The Physical Object

Format
Microform
Pagination
vi, 81 p.
Number of pages
81

Edition Identifiers

Open Library
OL13630510M
OCLC/WorldCat
50255496

Work Identifiers

Work ID
OL3129786W

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
August 4, 2012 Edited by VacuumBot Updated format '[microform] /' to 'Microform'; cleaned up pagination
December 15, 2009 Edited by WorkBot link works
April 27, 2009 Edited by ImportBot add OCLC number
August 29, 2008 Created by ImportBot Imported from Western Washington University MARC record