An edition of Emerging lithographic technologies X (2006)

Emerging lithographic technologies X

21-23 February, 2006, San Jose, California, USA

Emerging lithographic technologies X
Michael J. Lercel, chair/edito ...
Not in Library

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Last edited by ImportBot
February 1, 2023 | History
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An edition of Emerging lithographic technologies X (2006)

Emerging lithographic technologies X

21-23 February, 2006, San Jose, California, USA

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Publish Date
Publisher
SPIE
Language
English

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Subjects

Electron beam Lithography, X-rays, X-ray lithography, Congresses, Masks (Electronics), Industrial applications, Microlithography, X-rays, industrial applications, Masks (electronics)

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Edition Availability
Cover of: Emerging lithographic technologies X
Emerging lithographic technologies X: 21-23 February, 2006, San Jose, California, USA
2006, SPIE
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and author index.

Published in
Bellingham, Wash
Series
Proceedings of SPIE -- v. 6151, Proceedings of SPIE--the International Society for Optical Engineering -- v. 6151.
Genre
Congresses.

Classifications

Library of Congress
TK7874 .E527 2006, TK7874.E527 2006

The Physical Object

Pagination
2 v. :

ID Numbers

Open Library
OL16293028M
ISBN 10
0819461946
ISBN 13
9780819461940
LCCN
2007533259

Source records

Library of Congress MARC record
Better World Books record
Library of Congress MARC record
amazon.com record

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History

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February 1, 2023 Edited by ImportBot import existing book
December 19, 2020 Edited by MARC Bot import existing book
October 9, 2020 Edited by ImportBot import existing book
August 2, 2020 Edited by ImportBot import existing book
September 23, 2008 Created by ImportBot Imported from Library of Congress MARC record