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Previews available in: English
Edition | Availability |
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1
Resolution Enhancement Techniques in Optical Lithography
2001, SPIE
in English
0819478814 9780819478818
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2
Resolution enhancement techniques in optical lithography
2001, SPIE Optical Engineering Press, SPIE Publications, Brand: SPIE Publications, SPIE Press
in English
0819439959 9780819439956
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Book Details
Edition Notes
Includes bibliographical references (p. 189-208) and index.
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The Physical Object
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History
- Created September 29, 2008
- 10 revisions
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May 23, 2023 | Edited by ImportBot | import existing book |
February 12, 2023 | Edited by ImportBot | import existing book |
January 4, 2023 | Edited by MARC Bot | import existing book |
December 24, 2021 | Edited by ImportBot | import existing book |
September 29, 2008 | Created by ImportBot | Imported from Oregon Libraries MARC record |