Resolution enhancement techniques in optical lithography

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Last edited by ImportBot
May 23, 2023 | History

Resolution enhancement techniques in optical lithography

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Previews available in: English

Edition Availability
Cover of: Resolution Enhancement Techniques in Optical Lithography
Resolution Enhancement Techniques in Optical Lithography
2001, SPIE
in English
Cover of: Resolution enhancement techniques in optical lithography
Resolution enhancement techniques in optical lithography
2001, SPIE Optical Engineering Press, SPIE Publications, Brand: SPIE Publications, SPIE Press
in English

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Book Details


Edition Notes

Includes bibliographical references (p. 189-208) and index.

Published in
Bellingham, WA
Series
Tutorial texts in optical engineering -- v. TT 47.

Classifications

Dewey Decimal Class
621.3815/31
Library of Congress
TK7874 .W647 2001, TK7874.W647 2001

The Physical Object

Pagination
xvii, 214 p. :
Number of pages
214

ID Numbers

Open Library
OL17599045M
Internet Archive
resolutionenhanc0047wong
ISBN 10
0819439959
LCCN
2001020028
OCLC/WorldCat
45879722
Library Thing
359368
Goodreads
3365323

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
May 23, 2023 Edited by ImportBot import existing book
February 12, 2023 Edited by ImportBot import existing book
January 4, 2023 Edited by MARC Bot import existing book
December 24, 2021 Edited by ImportBot import existing book
September 29, 2008 Created by ImportBot Imported from Oregon Libraries MARC record