| Record ID | harvard_bibliographic_metadata/ab.bib.12.20150123.full.mrc:515732611:840 |
| Source | harvard_bibliographic_metadata |
| Download Link | /show-records/harvard_bibliographic_metadata/ab.bib.12.20150123.full.mrc:515732611:840?format=raw |
LEADER: 00840cam a22002534a 4500
001 012652194-8
005 20110110122440.0
008 010125s2001 waua b 001 0 eng
010 $a 2001020028
020 $a0819439959 (softcover)
040 $aDLC$cDLC$dDLC
042 $apcc
050 00 $aTK7874$b.W647 2001
082 00 $a621.3815/31$221
100 1 $aWong, Alfred Kwok-Kit.
245 10 $aResolution enhancement techniques in optical lithography /$cAlfred Kwok-Kit Wong.
260 $aBellingham, Wash. :$bSPIE Press,$cc2001
300 $axvii, 214 p. :$bill. ;$c26 cm.
440 0 $aTutorial texts in optical engineering ;$vv. TT 47
504 $aIncludes bibliographical references (p. 189-208) and index.
650 0 $aIntegrated circuits$xDesign and construction.
650 0 $aMicrolithography.
988 $a20110110
906 $0DLC