An edition of Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems
(1992)
Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems
by Carol F. Vezzetti
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Publish Date
1992
Publisher
U.S. Dept. of Commerce, National Institute of Standards and Technology,
Order from National Technical Information Service]
Language
English
Pages
37
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Showing 5 featured editions. View all 5 editions?
| Edition | Availability |
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1
Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems
1992, U.S. Dept. of Commerce, National Institute of Standards and Technology, Order from National Technical Information Service]
Microform
in English
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aaaa
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2
Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems
1992, U.S. Dept. of Commerce, National Institute of Standards and Technology, Order from National Technical Information Service]
Microform
in English
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zzzz
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3
Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems
1992, U.S. Dept. of Commerce, National Institute of Standards and Technology, Order from National Technical Information Service]
Microform
in English
|
zzzz
|
|
4
Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems
1992, U.S. Dept. of Commerce, National Institute of Standards and Technology, Order from National Technical Information Service]
Microform
in English
|
zzzz
|
|
5
Antireflecting-Chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems
1992, U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology
in English
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zzzz
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Book Details
Edition Notes
Distributed to depository libraries in microfiche.
Shipping list no.: 92-2096-M.
Paper version no longer for sale by the Supt. of Docs.
"Issued January 1992."
Includes bibliographical references.
Final.
Microfiche. [Washington, D.C.?] : Supt. of Docs., U.S. G.P.O., [1992] 1 microfiche : negative.
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History
- Created October 9, 2008
- 3 revisions
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| August 8, 2012 | Edited by VacuumBot | Updated format '[microform] /' to 'Microform'; cleaned up pagination |
| December 15, 2009 | Edited by WorkBot | link works |
| October 9, 2008 | Created by ImportBot | Imported from Oregon Libraries MARC record |