An edition of Advances in Resist Technology and Processing IX (1992)

Advances in resist technology and processing IX

9-10 March 1992, San Jose, California

by

Cover of: Advances in resist technology and processing IX by Anthony E. Novembre
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Last edited by MARC Bot
July 31, 2019 | History
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An edition of Advances in Resist Technology and Processing IX (1992)

Advances in resist technology and processing IX

9-10 March 1992, San Jose, California

by

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Publish Date
Publisher
SPIE--the International Society for Optical Engineering
Language
English
Pages
684

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Subjects

Photoresists, Congresses, Photoresistors, Strength of materials
Edition Availability
Cover of: Advances in resist technology and processing X
Advances in resist technology and processing X: 1-2 March, 1992, San Jose, California
1993, SPIE
in English
Cover of: Advances in resist technology and processing IX
Advances in resist technology and processing IX: 9-10 March 1992, San Jose, California
1992, SPIE--the International Society for Optical Engineering
in English
Cover of: Advances in Resist Technology and Processing IX
Advances in Resist Technology and Processing IX: 9-10 March 1992 San Jose, California (Proceedings of S P I E)
June 1992, SPIE-International Society for Optical Engine
Paperback in English

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Book Details

Edition Notes

"The papers ... presented at the ninth conference on Advances in Resist Technology and Processing, held as part of the 1922 SPIE Symposium on Microlithography"--Introd.

Includes bibliographical references and index.

Published in
Bellingham, Wash., USA
Series
SPIE proceedings series -- v. 1672., Proceedings of SPIE--the International Society for Optical Engineering -- v. 1672.
Genre
Congresses.

The Physical Object

Pagination
xi, 684 p. :
Number of pages
684

Edition Identifiers

Open Library
OL19567474M
ISBN 10
0819408271
ISBN 13
9780819408273
OCLC/WorldCat
29380105

Work Identifiers

Work ID
OL9620630W

Source records

Oregon Libraries MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 31, 2019 Edited by MARC Bot associate edition with work OL9620630W
April 13, 2010 Edited by Open Library Bot Linked existing covers to the edition.
April 25, 2009 Edited by ImportBot add OCLC number
October 22, 2008 Created by ImportBot Imported from Oregon Libraries MARC record