Advances in resist technology and processing XII

20-22 February 1995, Santa Clara, California

Advances in resist technology and processing ...
Robert D. Allen
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Last edited by MARC Bot
July 31, 2019 | History

Advances in resist technology and processing XII

20-22 February 1995, Santa Clara, California

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Publish Date
Publisher
SPIE
Language
English
Pages
904

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Edition Availability
Cover of: Advances in Resist Technology and Processing XII
Advances in Resist Technology and Processing XII
February 1995, Society of Photo Optical
Hardcover in English
Cover of: Advances in resist technology and processing XII

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Book Details


Edition Notes

Includes bibliographical references and author index.

Published in
Bellingham, Wash., USA
Series
Proceedings / SPIE--the International Society for Optical Engineering -- v. 2438., Proceedings of SPIE--the International Society for Optical Engineering -- v. 2438.
Genre
Congresses.

The Physical Object

Pagination
xiii, 904 p. :
Number of pages
904

ID Numbers

Open Library
OL19567790M
ISBN 10
0819417866
ISBN 13
9780819417862
LCCN
94069901
OCLC/WorldCat
32808965

Source records

Oregon Libraries MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 31, 2019 Edited by MARC Bot associate edition with work OL5905278W
April 25, 2009 Edited by ImportBot add OCLC number
October 22, 2008 Created by ImportBot Imported from Oregon Libraries MARC record