Advances in resist technology and processing XV

23-25 February, 1998, Santa Clara, California

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Last edited by MARC Bot
July 31, 2019 | History

Advances in resist technology and processing XV

23-25 February, 1998, Santa Clara, California

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Publish Date
Publisher
SPIE
Language
English
Pages
1464

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Edition Availability
Cover of: Advances in resist technology and processing XV
Cover of: Advances in Resist Technology and Processing XV
Advances in Resist Technology and Processing XV
1998, SPIE-International Society for Optical Engine
Hardcover in English

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Book Details


Edition Notes

Includes bibliographical references and author index.

Published in
Bellingham, Washington
Series
Proceedings SPIE--the International Society for Optical Engineering -- v. 3333., Proceedings of SPIE--the International Society for Optical Engineering -- v. 3333.
Genre
Congresses.

The Physical Object

Pagination
2 v. (xvii, 1464 p.) :
Number of pages
1464

ID Numbers

Open Library
OL19567999M
ISBN 10
0819427780
ISBN 13
9780819427786
OCLC/WorldCat
39634674

Source records

Oregon Libraries MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 31, 2019 Edited by MARC Bot associate edition with work OL9620734W
April 13, 2010 Edited by Open Library Bot Linked existing covers to the edition.
April 25, 2009 Edited by ImportBot add OCLC number
October 22, 2008 Created by ImportBot Imported from Oregon Libraries MARC record