An edition of Semiconductor machining at the micro-nano scale (2007)

Semiconductor machining at the micro-nano scale
Semiconductor machining at the micro-nano sca ...
edited by Jiwang Yan and John ...
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Last edited by MARC Bot
December 23, 2020 | History
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An edition of Semiconductor machining at the micro-nano scale (2007)

Semiconductor machining at the micro-nano scale

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Publish Date
Publisher
Transworld Research Network
Language
English
Pages
360

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Subjects

Semicondutores, Electronic industries, Semiconductors, Design and construction
Edition Availability
Cover of: Semiconductor machining at the micro-nano scale
Semiconductor machining at the micro-nano scale
2007, Transworld Research Network
in English
Cover of: Semiconductor machining at the micro-nano scale
Semiconductor machining at the micro-nano scale
2007, Transworld Research Network
in English

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Book Details

Table of Contents

Part 1/ SINGLE- POINT MACHINING PROCESSES: Surface and subsurface integrity in ductile machining of semiconductor materials/ Jiwang Yan
Numerical simulations and cutting experiments on single point diamond machining of semiconductors and ceramics / John A. Patten, Jerry Jacob, Biswarup Bhattacharya, Andrew Grevstad, Ning Fang and Eric R. Marsh
Ductile machining and high pressure phase transformations of semiconductor crystals / Renato Goulart Jasinevicius, Jaime Gilberto Duduch and Paulo Sergio Pizani.
Part 2/ CHARACTERIZATION OF DEFORMATION MECHANISMS: Microstructural cahnges in silicon caused by indentation and machining / L. C. Zhang
MD simulation of semiconductor micromachining / Hiroaki Tanaka and Shoichi Shimada.
Part 3/ ABRASIVE MACHINING PROCESSES: Grinding of silicon wafers in the nano-technology era / Z.J. Pei, Z. C. Li and G. R. Fisher
Single-crystalline and poly-crystalline silicon wafer production using slurry wire for wafer slicing with micro-and nano-scale rolling-indenting / Sumeet Bhagavat and Imin Kao
Tribo-metrology of CMP / Norm V. Gitts
Part 4/ HYBRID AND LASER MACHINING: Semiconductor nanofabrication by combining nanoscale machining with wet etching / Noboiru Morita and Noritaka Kawasegi
Laser machining of semiconductor devices / Maher S. Amer.

Edition Notes

Includes bibliographical references and index.

Published in
Kerala, India

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TK7871.85 .S42934 2007

The Physical Object

Pagination
360 p. :
Number of pages
360

ID Numbers

Open Library
OL23974855M
ISBN 10
8178953013
ISBN 13
9788178953014
LCCN
2009417219

Source records

Library of Congress MARC record
Library of Congress MARC record
Library of Congress MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
December 23, 2020 Edited by MARC Bot import existing book
February 9, 2019 Edited by MARC Bot import existing book
February 9, 2019 Edited by MARC Bot import existing book
December 19, 2009 Created by ImportBot Imported from Library of Congress MARC record