An edition of Electron-beam, x-ray, and ion-beam lithographies VI (1987)

Electron-beam, x-ray, and ion-beam lithographies VI

[proceedings] 5-6 March 1987, Santa Clara, California

Cover of: Electron-beam, x-ray, and ion-beam lithographies VI by Phillip D. Blais, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
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Last edited by MARC Bot
July 21, 2024 | History
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An edition of Electron-beam, x-ray, and ion-beam lithographies VI (1987)

Electron-beam, x-ray, and ion-beam lithographies VI

[proceedings] 5-6 March 1987, Santa Clara, California

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Publish Date
Publisher
The Society
Language
English
Pages
265

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Subjects

Electron beam Lithography, Congresses, Ion beam lithography, X-ray lithography, Microlithography
Edition Availability
Cover of: Electron-beam, x-ray, and ion-beam lithographies VI
Electron-beam, x-ray, and ion-beam lithographies VI: [proceedings] 5-6 March 1987, Santa Clara, California
1987, The Society
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographies and index.

Published in
Bellingham, Wash., USA
Series
Proceedings of SPIE--the International Society for Optical Engineering ;, v. 773

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TK7874 .E4817 1987

The Physical Object

Pagination
vi, 265 p. :
Number of pages
265

ID Numbers

Open Library
OL2410840M
ISBN 10
0892528087
LCCN
87060741
OCLC/WorldCat
506773759
Goodreads
4360418

Source records

Scriblio MARC record
Library of Congress MARC record
Promise Item
marc_columbia MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 21, 2024 Edited by MARC Bot import existing book
January 14, 2023 Edited by ImportBot import existing book
November 6, 2020 Edited by MARC Bot import existing book
April 2, 2019 Edited by MARC Bot import existing book
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record