An edition of Alternative lithographic technologies (2009)

Alternative lithographic technologies

24-26 February 2009, San Jose, California, United States

by and

Alternative lithographic technologies
F. M. Schellenberg, Bruno M. L ...
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Last edited by MARC Bot
September 24, 2020 | History
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An edition of Alternative lithographic technologies (2009)

Alternative lithographic technologies

24-26 February 2009, San Jose, California, United States

by and

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Publish Date
Publisher
SPIE
Language
English

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Subjects

Electron beam Lithography, Congresses, Microlithography, Masks (Electronics), Industrial applications, Extreme ultraviolet lithography

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Edition Availability
Cover of: Alternative lithographic technologies
Alternative lithographic technologies: 24-26 February 2009, San Jose, California, United States
2009, SPIE
in English
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Libraries near you: WorldCat

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Book Details

Edition Notes

Previous conference proceedings entitled: Emerging lithographic technologies.

Includes bibliographical references and author index.

Published in
Bellingham, Wash
Series
Proceedings of SPIE -- v. 7271, Proceedings of SPIE--the International Society for Optical Engineering -- v. 7271.
Other Titles
Emerging lithographic technologies.

Classifications

Library of Congress
TK7872.M3 .A48 2009

The Physical Object

Pagination
v. <2> :

ID Numbers

Open Library
OL24544997M
ISBN 10
0819475246
ISBN 13
9780819475244
LCCN
2010455661
OCLC/WorldCat
355813963

Source records

Library of Congress MARC record
Library of Congress MARC record
Library of Congress MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
September 24, 2020 Edited by MARC Bot import existing book
October 27, 2011 Edited by LC Bot import new book
December 16, 2010 Created by ImportBot Imported from Library of Congress MARC record