An edition of Nanoimprint lithography
(2011)
Nanoimprint lithography
principles, processes and materials
by Hongbo Lan
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Subjects
Nanoelectronics, Nanostructures, Microlithography, Nanolithography| Edition | Availability |
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1
Nanoimprint lithography: principles, processes and materials
2011, Nova Science Publishers, Inc.
in English
1611225019 9781611225013
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Book Details
Table of Contents
Principle and fundamental process for NIL
Variations of NIL processes
NIL materials
Prospects and challenges in NIL.
Edition Notes
Includes bibliographical references (p. [61]-68) and index.
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History
- Created October 23, 2011
- 4 revisions
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| June 17, 2022 | Edited by ImportBot | import existing book |
| November 13, 2020 | Edited by MARC Bot | import existing book |
| August 21, 2020 | Edited by ImportBot | import existing book |
| October 23, 2011 | Created by LC Bot | Imported from Library of Congress MARC record |