Acoustic wave and electromechanical resonators
concept to key applications
by Humberto Campanella
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This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensin.
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Acoustic wave and electromechanical resonators: concept to key applications
2010, Artech House
electronic resource :
in English
1607839784 9781607839781
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Includes bibliographical references and index.
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- Created July 28, 2014
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| May 23, 2020 | Edited by CoverBot | Added new cover |
| July 28, 2014 | Created by ImportBot | Imported from Internet Archive item record |