An edition of Acoustic wave and electromechanical resonators (2010)

Acoustic wave and electromechanical resonators

concept to key applications

by

Cover of: Acoustic wave and electromechanical resonators by Humberto Campanella, Humberto Campanella
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Last edited by CoverBot
May 23, 2020 | History
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An edition of Acoustic wave and electromechanical resonators (2010)

Acoustic wave and electromechanical resonators

concept to key applications

by

This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensin.

Publish Date
Publisher
Artech House
Language
English
Pages
345

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Previews available in: English

Subjects

TECHNOLOGY & ENGINEERING, Engineering: Electrical, Electric resonators, Acoustic surface wave devices, Microelectronics, Engineering, Digital, Electronics
Edition Availability
Cover of: Acoustic wave and electromechanical resonators
Acoustic wave and electromechanical resonators: concept to key applications
2010, Artech House
electronic resource : in English

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Book Details

Table of Contents

1. MEMs and NEMs resonator technologies
2. Acoustic microresonator technologies
3. Design and modeling of micro- and nanoresonators
4. Fabrication techniques
5. Characterization techniques
6. Performance optimization
7. Integration of resonator to CMOS technologies
8. Sensor applications
9. Radio frequency applications
10. Case studies.

Edition Notes

Includes bibliographical references and index.

Description based on print version record.

Published in
Norwood, MA
Series
Integrated microsystems series, Artech House integrated microsystems series
Other Titles
Acoustic wave & electromechanical resonators

Classifications

Dewey Decimal Class
621.381
Library of Congress
TK5981 .C34 2010eb

The Physical Object

Format
[electronic resource] :
Pagination
1 online resource (xv, 345 p.) :
Number of pages
345

Edition Identifiers

Open Library
OL25537153M
Internet Archive
acousticwaveelec00camp
ISBN 10
1607839784
ISBN 13
9781607839781
OCLC/WorldCat
659579814

Work Identifiers

Work ID
OL16921196W

Source records

Internet Archive item record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
May 23, 2020 Edited by CoverBot Added new cover
July 28, 2014 Created by ImportBot Imported from Internet Archive item record