Micromachined Ultrasound-Based Proximity Sensors

  • 1 Have read
Locate

My Reading Lists:

Create a new list

Check-In

×Close
Add an optional check-in date. Check-in dates are used to track yearly reading goals.
Today

  • 1 Have read

Buy this book

Last edited by ImportBot
February 26, 2022 | History

Micromachined Ultrasound-Based Proximity Sensors

  • 1 Have read

Micromachined Ultrasound-Based Proximity Sensors presents a packaged ultrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. It describes the characterization, optimization and the long-term stability of silicon membrane resonators as well as appropriate packaging for ultrasound microsystems. Micromachined Ultrasound-Based Proximity Sensors describes a cost-effective approach to the realization of a micro electro mechanical system (MEMS). The micromachined silicon transducer elements were fabricated using industrial IC technology combined with standard silicon micromachining techniques. Additionally, this approach allows the cointegration of the driving and read-out circuitry. To ensure the industrial applicability of the fabricated transducer elements intensive long-term stability and reliability tests were performed under various environmental conditions such as high temperature and humidity. Great effort was undertaken to investigate the packaging and housing of the ultrasound system, which mainly determine the success or failure of an industrial microsystem. A low-stress mounting of the transducer element minimizes thermomechanical stress influences. The developed housing not only protects the silicon chip but also improves the acoustic performance of the transducer elements. The developed ultrasound proximity sensor system can determine object distances up to 10 cm with an accuracy of better than 0.8 mm. Micromachined Ultrasound-Based Proximity Sensors will be of interest to MEMS researchers as well as those involved in solid-state sensor development.

Publish Date
Publisher
Springer US
Language
English
Pages
121

Buy this book

Previews available in: English

Edition Availability
Cover of: Micromachined Ultrasound-Based Proximity Sensors
Micromachined Ultrasound-Based Proximity Sensors
1999, Springer US
electronic resource / in English

Add another edition?

Book Details


Edition Notes

Online full text is restricted to subscribers.

Also available in print.

Mode of access: World Wide Web.

Published in
Boston, MA
Series
Microsystems -- 4, Microsystems -- 4

Classifications

Dewey Decimal Class
621.3
Library of Congress
TK1-9971

The Physical Object

Format
[electronic resource] /
Pagination
1 online resource (xiii, 121 p.)
Number of pages
121

ID Numbers

Open Library
OL27074793M
Internet Archive
micromachinedult00horn
ISBN 10
1461372690, 1461549973
ISBN 13
9781461372691, 9781461549970
OCLC/WorldCat
851828819

Community Reviews (0)

Feedback?
No community reviews have been submitted for this work.

Lists

This work does not appear on any lists.

History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
February 26, 2022 Edited by ImportBot import existing book
August 24, 2020 Edited by ImportBot import existing book
July 5, 2019 Created by MARC Bot Imported from Internet Archive item record