An edition of Emerging Lithographic Technologies XII (2008)

Emerging Lithographic Technologies XII

26-28 February 2008, San Jose, California, USA

by

Emerging Lithographic Technologies XII
Frank Schellenberg, Frank Sche ...
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Last edited by MARC Bot
November 14, 2020 | History
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An edition of Emerging Lithographic Technologies XII (2008)

Emerging Lithographic Technologies XII

26-28 February 2008, San Jose, California, USA

by

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Publish Date
Publisher
SPIE
Language
English
Pages
1144

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Subjects

Lithography, electron beam, Microlithography, X-ray lithography, Masks (electronics), X-rays, industrial applications, Electron beam Lithography, Congresses, Industrial applications, X-rays, Masks (Electronics)

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Edition Availability
Cover of: Emerging Lithographic Technologies XII
Emerging Lithographic Technologies XII: 26-28 February 2008, San Jose, California, USA
2008, SPIE
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Classifications

Library of Congress
TK7874.E57 2008, TK7874 .E57 2008

ID Numbers

Open Library
OL28474284M
ISBN 13
9780819471062
LCCN
2010287918

Source records

Better World Books record
Library of Congress MARC record

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Download catalog record: RDF / JSON / OPDS | Wikipedia citation
November 14, 2020 Edited by MARC Bot import existing book
August 2, 2020 Created by ImportBot Imported from Better World Books record