An edition of Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies III (1984)

Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies III

March 15-16, 1984, Santa Clara, California

Cover of: Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies III by Alfred Wagner, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics.
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Last edited by ImportBot
July 30, 2023 | History
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An edition of Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies III (1984)

Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies III

March 15-16, 1984, Santa Clara, California

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Publish Date
Publisher
SPIE--the International Society for Optical Engineering
Language
English
Pages
136

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Previews available in: English

Subjects

Electron beam Lithography, Congresses, Ion beam lithography, X-ray lithography
Edition Availability
Cover of: Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies III
Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies III: March 15-16, 1984, Santa Clara, California
1984, SPIE--the International Society for Optical Engineering
in English

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Book Details

Edition Notes

Published in
Bellingham, Wash., USA
Series
Proceedings of SPIE--the International Society for Optical Engineering ;, v. 471

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TK7874 .E482 1984

The Physical Object

Pagination
vi, 136 p. :
Number of pages
136

Edition Identifiers

Open Library
OL2870262M
Internet Archive
isbn_0892525061_471
ISBN 10
0892525061
LCCN
84050821
Goodreads
2755430

Work Identifiers

Work ID
OL19182202W

Source records

Scriblio MARC record
Library of Congress MARC record
Internet Archive item record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 30, 2023 Edited by ImportBot import existing book
October 30, 2020 Edited by MARC Bot import existing book
March 11, 2019 Edited by MARC Bot import existing book
April 16, 2010 Edited by bgimpertBot Added goodreads ID.
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record