An edition of Alternative lithographic technologies IV (2012)

Alternative lithographic technologies IV

13-16 February 2012, San Jose, California, United States

by and

Alternative lithographic technologies IV
William Man-Wai Tong, Douglas ...
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Last edited by MARC Bot
November 12, 2020 | History
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An edition of Alternative lithographic technologies IV (2012)

Alternative lithographic technologies IV

13-16 February 2012, San Jose, California, United States

by and

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Publish Date
Publisher
SPIE
Language
English

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Subjects

Extreme ultraviolet lithography, Congresses, Electron beam Lithography, Microlithography, Industrial applications, Masks (Electronics)

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Edition Availability
Cover of: Alternative lithographic technologies IV
Alternative lithographic technologies IV: 13-16 February 2012, San Jose, California, United States
2012, SPIE
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and author index.

Published in
Bellingham, Washington
Series
Proceedings of SPIE -- volume 8323
Other Titles
Alternative lithographic technologies 4, Alternative lithographic technologies four

Classifications

Library of Congress
TK7872.M3 A484 2012

The Physical Object

Pagination
1 volume (various pagings)

ID Numbers

Open Library
OL30958467M
ISBN 13
9780819489791
LCCN
2013427479

Source records

Library of Congress MARC record

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History

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November 12, 2020 Created by MARC Bot Imported from Library of Congress MARC record