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Chemical mechanical planarization VI: proceedings of the international symposium
2003, Electrochemical Society
in English
1566774047 9781566774048
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Edition Notes
Includes bibliographical references and indexes.
"... proceedings of the 6th International Symposium on Chemical Mechanical Planarization (CMP) in Integrated Circuit Device Manufacturing held at the 204th Meeting of the Electrochemical Society, in Orlando, Florida from October 12th to 17th, 2003"--Pref.
"Sponsoring division, Electronics."
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- Created April 1, 2008
- 7 revisions
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December 8, 2020 | Edited by MARC Bot | import existing book |
April 16, 2010 | Edited by bgimpertBot | Added goodreads ID. |
April 14, 2010 | Edited by Open Library Bot | Linked existing covers to the edition. |
December 14, 2009 | Edited by WorkBot | link works |
April 1, 2008 | Created by an anonymous user | Imported from Scriblio MARC record |