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Previews available in: English
Edition | Availability |
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1
Microelectromechanical Systems: Advanced Materials and Fabrication Methods
January 1, 2000, National Academies Press
Paperback
in English
0309059801 9780309059800
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2
Microelectromechanical Systems: Advanced Materials and Fabrication Methods
1997, National Academies Press
in English
0309174341 9780309174343
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