An edition of Angular sensitivity of controlled implanted doping profiles (1978)

Angular sensitivity of controlled implanted doping profiles

by

Angular sensitivity of controlled implanted d ...
Wilson, Robert G.
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Last edited by MARC Bot
October 15, 2020 | History
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An edition of Angular sensitivity of controlled implanted doping profiles (1978)

Angular sensitivity of controlled implanted doping profiles

by

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Publish Date
Publisher
U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Doc., U.S. Govt. Print. Off.
Language
English
Pages
54

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Subjects

Semiconductor doping, Ion implantation, Integrated circuits
Edition Availability
Cover of: Angular sensitivity of controlled implanted doping profiles
Angular sensitivity of controlled implanted doping profiles
1978, Department of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off.
in English
Cover of: Angular sensitivity of controlled implanted doping profiles
Angular sensitivity of controlled implanted doping profiles
1978, U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Doc., U.S. Govt. Print. Off.
in English

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Book Details

Edition Notes

Includes bibliographical references.

Published in
[Washington]
Series
Semiconductor measurement technology, NBS special publication ; 400-49, NBS special publication ;, 400-49.

Classifications

Dewey Decimal Class
602/.1 s, 621.3815/2/028
Library of Congress
QC100 .U57 no. 400-49, TK7871.85 .U57 no. 400-49

The Physical Object

Pagination
vii, 54 p. :
Number of pages
54

ID Numbers

Open Library
OL4723120M
LCCN
78010624

Source records

Library of Congress MARC record

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
October 15, 2020 Edited by MARC Bot import existing book
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record