An edition of Scanning probe lithography
(2001)
Scanning Probe Lithography (Microsystems, Volume 7) (Microsystems)
1 edition
by Hyongsok T. Soh, Kathryn Wilder Guarini, and Calvin F. Quate
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Subjects
Design and construction, Integrated circuits, Microlithography, Scanning probe microscopy, Semi-conductors & super-conductors, Engineering - Electrical & Electronic, Technology, Microelectronics, Technology & Industrial Arts, Science/Mathematics, Electronics - Circuits - Printed, Material Science, Technology / Electronics / Circuits / General, Technology / Electronics / Circuits / Printed, Technology : Engineering - Electrical & Electronic, Technology : Material Science, Electronics - Circuits - Integrated, Electronics - Microelectronics, MicroscopyShowing 3 featured editions. View all 3 editions?
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Scanning Probe Lithography (Microsystems, Volume 7) (Microsystems)
June 30, 2001, Springer
Hardcover
in English
- 1 edition
0792373618 9780792373612
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Book Details
First Sentence
"Semiconductor lithography is the patterning process used to define the structures that make up integrated circuits (ICs)."
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History
- Created April 29, 2008
- 5 revisions
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| July 31, 2019 | Edited by MARC Bot | associate edition with work OL8362357W |
| April 24, 2010 | Edited by Open Library Bot | Fixed duplicate goodreads IDs. |
| April 16, 2010 | Edited by bgimpertBot | Added goodreads ID. |
| April 14, 2010 | Edited by Open Library Bot | Linked existing covers to the edition. |
| April 29, 2008 | Created by an anonymous user | Imported from amazon.com record |