An edition of Scanning probe lithography (2001)

Scanning probe lithography

by , , and

Scanning probe lithography
Hyongsok T. Soh, Kathryn Wilde ...
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Last edited by bgimpertBot
April 16, 2010 | History
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An edition of Scanning probe lithography (2001)

Scanning probe lithography

by , , and

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Publish Date
Publisher
Kluwer Academic Publishers
Language
English
Pages
195

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Subjects

Design and construction, Integrated circuits, Microlithography, Scanning probe microscopy, Semi-conductors & super-conductors, Engineering - Electrical & Electronic, Technology, Microelectronics, Technology & Industrial Arts, Science/Mathematics, Electronics - Circuits - Printed, Material Science, Technology / Electronics / Circuits / General, Technology / Electronics / Circuits / Printed, Technology : Engineering - Electrical & Electronic, Technology : Material Science, Electronics - Circuits - Integrated, Electronics - Microelectronics, Microscopy

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Edition Availability
Cover of: Scanning Probe Lithography (Microsystems, Volume 7) (Microsystems)
Scanning Probe Lithography (Microsystems, Volume 7) (Microsystems)
June 30, 2001, Springer
Hardcover in English - 1 edition
Libraries near you: WorldCat
Cover of: Scanning probe lithography
Scanning probe lithography
2001, Kluwer Academic Publishers
in English
  • Not in Library
Libraries near you: WorldCat
Cover of: Scanning probe lithography
Scanning probe lithography
2001, Kluwer Academic Publishers
in English
Libraries near you: WorldCat

Add another edition?

Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Boston
Series
Microsystems -- v. 7, Microsystems (Series) -- v. 7.

Classifications

Dewey Decimal Class
621.3815/31
Library of Congress
TK7874 .S648 2001

The Physical Object

Pagination
xxiii, 195 p. :
Number of pages
195

ID Numbers

Open Library
OL20643796M
ISBN 10
0792373618
LCCN
2001029782
Goodreads
5613327

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
April 16, 2010 Edited by bgimpertBot Added goodreads ID.
December 15, 2009 Edited by WorkBot link works
October 29, 2008 Created by ImportBot Imported from Library of Congress MARC record