Check nearby libraries
Buy this book
This edition doesn't have a description yet. Can you add one?
Check nearby libraries
Buy this book
Subjects
Tribology, Grinding and polishing, Technology: General Issues, Power Tools, Science, Home Improvement / Construction, Science/Mathematics, Engineering - General, Material Science, Technology / Material Science, Chemistry - General, Chemical mechanical planarization, Tribologie (Technologie), Planarisation chimicomécanique, HOUSE & HOMEShowing 6 featured editions. View all 6 editions?
Edition | Availability |
---|---|
1
Tribology in Chemical-Mechanical Planarization
2019, Taylor & Francis Group
in English
0367393255 9780367393250
|
zzzz
Libraries near you:
WorldCat
|
2
Tribology in Chemical-Mechanical Planarization
2005, Taylor & Francis Group
in English
128051678X 9781280516788
|
zzzz
Libraries near you:
WorldCat
|
3
Tribology In Chemical-Mechanical Planarization
March 1, 2005, CRC
Hardcover
in English
0824725670 9780824725679
|
aaaa
Libraries near you:
WorldCat
|
4
Tribology in Chemical-Mechanical Planarization
2005, Taylor & Francis Group
in English
1420028391 9781420028393
|
zzzz
Libraries near you:
WorldCat
|
5
Tribology in chemical-mechanical planarization
2005, Taylor & Francis
in English
0824725670 9780824725679
|
zzzz
Libraries near you:
WorldCat
|
6
Tribology in Chemical-Mechanical Planarization
2005, Taylor & Francis Group
in English
0429120087 9780429120084
|
zzzz
Libraries near you:
WorldCat
|
Book Details
First Sentence
"In the microelectronics community, the acronym CMP has been interpreted as either chemical-mechanical polishing or chemical-mechanical planarization."
The Physical Object
ID Numbers
Community Reviews (0)
Feedback?History
- Created April 29, 2008
- 7 revisions
Wikipedia citation
×CloseCopy and paste this code into your Wikipedia page. Need help?
July 31, 2019 | Edited by MARC Bot | associate edition with work OL13640198W |
April 24, 2010 | Edited by Open Library Bot | Fixed duplicate goodreads IDs. |
April 16, 2010 | Edited by bgimpertBot | Added goodreads ID. |
April 14, 2010 | Edited by Open Library Bot | Linked existing covers to the edition. |
April 29, 2008 | Created by an anonymous user | Imported from amazon.com record |