Characterization and Metrology for Ulsi Technology

1998 International Conference (AIP Conference Proceedings, Vol. 449)

1 edition
Characterization and Metrology for Ulsi Techn ...
David G. Seiler
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Last edited by MARC Bot
July 31, 2019 | History

Characterization and Metrology for Ulsi Technology

1998 International Conference (AIP Conference Proceedings, Vol. 449)

1 edition

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Publish Date
Language
English
Pages
960

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Edition Availability
Cover of: Characterization and metrology for ULSI technology
Cover of: Characterization and Metrology for Ulsi Technology
Characterization and Metrology for Ulsi Technology : 1998 International Conference (AIP Conference Proceedings, Vol. 449)
December 14, 1998, American Institute of Physics
Hardcover in English - 1 edition

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Book Details


The Physical Object

Format
Hardcover
Number of pages
960
Dimensions
11 x 8.5 x 2.2 inches
Weight
5.4 pounds

ID Numbers

Open Library
OL8646166M
ISBN 10
1563967537
ISBN 13
9781563967535
Goodreads
2691095

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 31, 2019 Edited by MARC Bot associate edition with work OL19424797W
April 24, 2010 Edited by Open Library Bot Fixed duplicate goodreads IDs.
April 16, 2010 Edited by bgimpertBot Added goodreads ID.
April 30, 2008 Created by an anonymous user Imported from amazon.com record